Cant install TS3 server on ubuntu

Hello, when I was installing TS3 server on a Ubuntu Server, I got an error when I use systemctl status ts3server, which shows
ts3server.service - Teamspeak Service
Loaded: loaded (/lib/systemd/system/ts3server.service; enabled; vendor preset: enabled)
Active: activating (auto-restart) (Result: exit-code) since Thu 2022-10-13 11:04:52 CST; 6s ago
Process: 16435 ExecStart=/home/teamspeak/ts3server_minimal_runscript.sh (code=exited, status=203/EXEC)
Main PID: 16435 (code=exited, status=203/EXEC)

Here is my log:
2022-10-13 03:06:23.889011|INFO |ServerLibPriv | |TeamSpeak 3 Server 3.13.7 (2022-06-20 12:21:53)
2022-10-13 03:06:23.889340|INFO |ServerLibPriv | |SystemInformation: Linux 5.4.0-126-generic #142-Ubuntu SMP Fri Aug 26 12:12:57 UTC 2022 x86_64 Binary: 64bit
2022-10-13 03:06:23.889363|INFO |ServerLibPriv | |Using hardware aes
2022-10-13 03:06:23.897935|INFO |DatabaseQuery | |dbPlugin name: SQLite3 plugin, Version 3, (c)TeamSpeak Systems GmbH
2022-10-13 03:06:23.897971|INFO |DatabaseQuery | |dbPlugin version: 3.11.1
2022-10-13 03:06:23.904651|INFO |DatabaseQuery | |checking database integrity (may take a while)
2022-10-13 03:06:23.909202|CRITICAL|DatabaseQuery | |setSQLfromFile( file:create_sqlite/create_tables.sql) failed

What should I do?

Ubuntu:

apt-get update
apt-get upgrade

Make the ts3 user

useradd -m ts3
cd /home/ts3
su ts3

Download ts3

wget https://files.teamspeak-services.com/releases/server/3.13.7/teamspeak3-server_linux_amd64-3.13.7.tar.bz2

Extract the files.

tar -jxvf teamspeak3-server_linux_amd64-3.13.7.tar.bz2
rm teamspeak3-server_linux_amd64-3.13.7.tar.bz2

Accept the license.

cd teamspeak3-server_linux_amd64
chmod 777 ts3server_startscript.sh
touch .ts3server_license_accepted

Start your ts3 server.

./ts3server_startscript.sh start
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